Research Equipment


Microscope

  • Spherical aberration corrected scanning transmission electron microscope (Cs-corrected STEM)
  • FED type high resolution analytical TEM
  • Conventional TEM
  • Lab Environmental Controllable Scanning Probe Microscope
  • Scanning Electron Microscope
  • Polarization microscope 1
  • Polarization microscope 2
  • Various kinds of Stereo microscope


  • Sample preparation

  • Bicrystal furnace
  • High temperature compression test machine
  • High temperature vacuum,atmosphere furnace
  • Quench furnace
  • Diffuse furnace
  • Other electrical furnaces
  • Plasma etching coating system (PECS)
  • Ultrahigh vacuum deposition machine


  • TEM sample preparation

  • Large size cutting machine
  • Low speed precise cutting machine
  • Ultrasonic cutting machine
  • Slurry drop type mechanichal grinder
  • Wedge polishing machine
  • Tripod type grinder
  • Dimple grinder
  • Precision Ion Polishing System (PIPS)
  • Low acceleration ion grinder
  • Low angle ion grinder
  • Ion slicer
  • Vacuum evapolator
  • Plasma cleaner
  • Ion cleaner
  • Hot plate
  • Ultrasonic cleaner


  • Computers for theoretical calculations

  • Parallel computing type high speed computers
  • Computers for personal use


  • Property measurement

  • Manual Prober
  • High temperature electrical furnace for physical property measurement
  • Wire bonder
  • Impedance analyzer
  • Semiconductor parameter analyzer



  • Microscope



    Spherical aberration corrected scanning transmission electron microscope (Cs-corrected STEM)

    FED type high resolution analytical TEM

    Conventional TEM

    Lab Environmental Controllable Scanning Probe Microscope

    Scanning Electron Microscope

    Polarization microscope 1

    Polarization microscope 2

    Various kinds of Stereo microscope

    Sample preparation



    Bicrystal furnace

    High temperature compression test machine

    High temperature vacuum,atmosphere furnace

    Quench furnace

    Diffuse furnace

    Other electrical furnaces

    Plasma etching coating system (PECS)

    Ultrahigh vacuum deposition machine

    TEM sample preparation



    Large size cutting machine

    Low speed precise cutting machine

    Ultrasonic cutting machine

    Slurry drop type mechanichal grinder

    Wedge polishing machine

    Tripod type grinder

    Dimple grinder

    Precision Ion Polishing System (PIPS)

    Low acceleration ion grinder

    Low angle ion grinder

    Ion slicer

    Vacuum evapolator

    Plasma cleaner

    Ion cleaner

    Hot plate

    Ultrasonic cleaner

    Computers for theoretical calculations



    Parallel computing type high speed computers

    Computers for personal use

    Property measurement

    Manual Prober

    High temperature electrical furnace for physical property measurement

    Impedance analyzer

    Semiconductor parameter analyzer