The University of Tokyo School of Engineering Institute of Engineering Innovation

　 　　　 　　　 　　　

Further Electrom Microscope

　　　　

Experimental devices

Cypher ES Environmental AFM/SPM

Ultra high vacuum evaporator

Vacuum atmosphere furnace

Dimple Grinder II Model657

PIPS II

PECS II

Model 1051 TEM Mill

Impedance analyzer

Prober

Vacuum evaporator

　　

Lab Environmental Controllable Scanning Probe Microscope

Atmosphere controlling crystal bonding furnace

Plasma etching coating system (PECS)

High temperature heating furnace for impedance measurement

Polarization microscope 1

Polarization microscope 2

Various kinds of Stereo microscope

High temperature vacuum,atmosphere furnace

Diffuse furnace

Low speed precise cutting machine

Ultrasonic cutting machine

Slurry drop type mechanichal grinder

Wedge polishing machine

Tripod type grinder

Dimple grinder

Precision Ion Polishing System (PIPS)

Low angle ion grinder

Ion slicer

Hot plate

Ultrasonic cleaner

Wire bonder

Semiconductor parameter analyzer

　　

Computers for theoretical calculations

Parallel computing type high speed computers

　　

Computers for personal use